Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma

J.W.A.M. Gielen, M.C.M. Sanden, van de, P.R.M. Kleuskens, M.J. Zande, van der, A.G.M. Kiers, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationPlasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages17
Publication statusPublished - 1996

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