Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma

J.W.A.M. Gielen, M.C.M. Sanden, van de, P.R.M. Kleuskens, M.J. Zande, van der, A.G.M. Kiers, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationPlasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages17
Publication statusPublished - 1996

Cite this

Gielen, J. W. A. M., Sanden, van de, M. C. M., Kleuskens, P. R. M., Zande, van der, M. J., Kiers, A. G. M., & Schram, D. C. (1996). Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma. In Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum (pp. 17)
Gielen, J.W.A.M. ; Sanden, van de, M.C.M. ; Kleuskens, P.R.M. ; Zande, van der, M.J. ; Kiers, A.G.M. ; Schram, D.C. / Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma. Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. pp. 17
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title = "Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma",
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Gielen, JWAM, Sanden, van de, MCM, Kleuskens, PRM, Zande, van der, MJ, Kiers, AGM & Schram, DC 1996, Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma. in Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. pp. 17.

Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma. / Gielen, J.W.A.M.; Sanden, van de, M.C.M.; Kleuskens, P.R.M.; Zande, van der, M.J.; Kiers, A.G.M.; Schram, D.C.

Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. p. 17.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma

AU - Gielen, J.W.A.M.

AU - Sanden, van de, M.C.M.

AU - Kleuskens, P.R.M.

AU - Zande, van der, M.J.

AU - Kiers, A.G.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 17

BT - Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum

ER -

Gielen JWAM, Sanden, van de MCM, Kleuskens PRM, Zande, van der MJ, Kiers AGM, Schram DC. Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma. In Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. p. 17