Halocarbon radical density measurements in low pressure RF plasmas using tunable infrared diode lasers

E. Stoffels, M. Haverlag, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Professional

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Original language	English
Title of host publication	Proceedings of the 7th international symposium on laser-aided plasma diagnostics : Fukuoka, Japan, 5-8 December 1995
Pages	289-294
Publication status	Published - 1995

Cite this

@inproceedings{3b961518717241c792a78774d6c5b2f2,

title = "Halocarbon radical density measurements in low pressure RF plasmas using tunable infrared diode lasers",

author = "E. Stoffels and M. Haverlag and G.M.W. Kroesen and {Hoog, de}, F.J.",

year = "1995",

language = "English",

pages = "289--294",

booktitle = "Proceedings of the 7th international symposium on laser-aided plasma diagnostics : Fukuoka, Japan, 5-8 December 1995",

}

Halocarbon radical density measurements in low pressure RF plasmas using tunable infrared diode lasers. / Stoffels, E.; Haverlag, M.; Kroesen, G.M.W. et al.
Proceedings of the 7th international symposium on laser-aided plasma diagnostics : Fukuoka, Japan, 5-8 December 1995. 1995. p. 289-294.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Professional

TY - GEN

T1 - Halocarbon radical density measurements in low pressure RF plasmas using tunable infrared diode lasers

AU - Stoffels, E.

AU - Haverlag, M.

AU - Kroesen, G.M.W.

AU - Hoog, de, F.J.

PY - 1995

Y1 - 1995

M3 - Conference contribution

SP - 289

EP - 294

BT - Proceedings of the 7th international symposium on laser-aided plasma diagnostics : Fukuoka, Japan, 5-8 December 1995

ER -