Halocarbon radical density measurements in low pressure RF plasmas using tunable infrared diode lasers

E. Stoffels, M. Haverlag, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

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Original languageEnglish
Title of host publicationProceedings of the 7th international symposium on laser-aided plasma diagnostics : Fukuoka, Japan, 5-8 December 1995
Publication statusPublished - 1995

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