Growth precursors in a remote silane plasma related to a-Si:H film quality

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Original language	English
Title of host publication	European Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts, p. D-4
Pages	D-4
Publication status	Published - 1999

Cite this

@inproceedings{95997af28bd94dba8b37f88193293724,

title = "Growth precursors in a remote silane plasma related to a-Si:H film quality",

author = "W.M.M. Kessels and {Sanden, van de}, M.C.M. and A.H.M. Smets and B.A. Korevaar and D.C. Schram",

year = "1999",

language = "English",

pages = "D--4",

booktitle = "European Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts, p. D-4",

}