Growth precursors in a remote silane plasma related to a-Si:H film quality

W.M.M. Kessels, M.C.M. Sanden, van de, A.H.M. Smets, B.A. Korevaar, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationEuropean Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts, p. D-4
Publication statusPublished - 1999

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