Growth precursors in a remote silane plasma related to a-Si:H film quality

W.M.M. Kessels; M.C.M. Sanden, van de; A.H.M. Smets; B.A. Korevaar; D.C. Schram

Growth precursors in a remote silane plasma related to a-Si:H film quality

W.M.M. Kessels, M.C.M. Sanden, van de, A.H.M. Smets, B.A. Korevaar, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France
Place of Publication	Paris
Publisher	Société Française du Vide
Pages	265-267
Publication status	Published - 1999
Event	CIP '99 : International Colloquium on Plasma Processes ; 12 - Juan-les-Pins Duration: 6 Jun 1999 → 10 Jun 1999

Publication series

Name	Vide: Science, Technique et Applications
Volume	291
ISSN (Print)	1266-0167

Conference

Conference	CIP '99 : International Colloquium on Plasma Processes ; 12
City	Juan-les-Pins
Period	6/06/99 → 10/06/99
Other

Cite this

Kessels, W. M. M., Sanden, van de, M. C. M., Smets, A. H. M., Korevaar, B. A., & Schram, D. C. (1999). Growth precursors in a remote silane plasma related to a-Si:H film quality. In Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France (pp. 265-267). (Vide: Science, Technique et Applications; Vol. 291). Société Française du Vide.

Kessels, W.M.M. ; Sanden, van de, M.C.M. ; Smets, A.H.M. et al. / Growth precursors in a remote silane plasma related to a-Si:H film quality. Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris : Société Française du Vide, 1999. pp. 265-267 (Vide: Science, Technique et Applications).

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title = "Growth precursors in a remote silane plasma related to a-Si:H film quality",

author = "W.M.M. Kessels and {Sanden, van de}, M.C.M. and A.H.M. Smets and B.A. Korevaar and D.C. Schram",

year = "1999",

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series = "Vide: Science, Technique et Applications",

publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

pages = "265--267",

booktitle = "Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France",

note = "CIP '99 : International Colloquium on Plasma Processes ; 12 ; Conference date: 06-06-1999 Through 10-06-1999",

}

Kessels, WMM , Sanden, van de, MCM, Smets, AHM, Korevaar, BA & Schram, DC 1999, Growth precursors in a remote silane plasma related to a-Si:H film quality. in Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Vide: Science, Technique et Applications, vol. 291, Société Française du Vide, Paris, pp. 265-267, CIP '99 : International Colloquium on Plasma Processes ; 12, Juan-les-Pins, 6/06/99.

Growth precursors in a remote silane plasma related to a-Si:H film quality. / Kessels, W.M.M.; Sanden, van de, M.C.M.; Smets, A.H.M. et al.

Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris : Société Française du Vide, 1999. p. 265-267 (Vide: Science, Technique et Applications; Vol. 291).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Growth precursors in a remote silane plasma related to a-Si:H film quality

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Smets, A.H.M.

AU - Korevaar, B.A.

AU - Schram, D.C.

PY - 1999

Y1 - 1999

M3 - Conference contribution

T3 - Vide: Science, Technique et Applications

SP - 265

EP - 267

BT - Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France

PB - Société Française du Vide

CY - Paris

T2 - CIP '99 : International Colloquium on Plasma Processes ; 12

Y2 - 6 June 1999 through 10 June 1999

ER -

Kessels WMM , Sanden, van de MCM, Smets AHM, Korevaar BA, Schram DC. Growth precursors in a remote silane plasma related to a-Si:H film quality. In Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris: Société Française du Vide. 1999. p. 265-267. (Vide: Science, Technique et Applications).