Good surface passivation of C-Si by high rate plasma deposited silicon oxide

B. Hoex, F.J.J. Peeters, M. Creatore, M.D. Bijker, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Fingerprint Dive into the research topics of 'Good surface passivation of C-Si by high rate plasma deposited silicon oxide'. Together they form a unique fingerprint.

Physics & Astronomy