Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas
- E.H. Kemaneci
- , E.A.D. Carbone
- , J.P. Booth
- , W.A.A.D. Graef
- , J. Dijk, van
- , G.M.W. Kroesen
Research output: Contribution to journal › Article › Academic › peer-review
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