Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

E.H. Kemaneci; E.A.D. Carbone; J.P. Booth; W.A.A.D. Graef; J. Dijk, van; G.M.W. Kroesen

doi:10.1088/0963-0252/23/4/045002

Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

E.H. Kemaneci, E.A.D. Carbone, J.P. Booth, W.A.A.D. Graef, J. Dijk, van, G.M.W. Kroesen

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

An inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion–ion plasma appears. In order to model this phenomenon, a novel quasi-neutrality implementation is proposed. Several distinct Cl wall recombination probability measurements exist in the literature, and their effect on the simulation data is compared. We also investigated the effect of the gas temperature that was imposed over the range 300–1500 K, not calculated self-consistently. Comparison with published experimental data from several sources for both continuous and pulsed modes shows good agreement with the simulation results.

Original language	English
Pages (from-to)	045002-1/14
Number of pages	14
Journal	Plasma Sources Science and Technology
Volume	23
Issue number	4
DOIs	https://doi.org/10.1088/0963-0252/23/4/045002
Publication status	Published - Aug 2014

Keywords

plasma physics
atomic and molecular physics
chemical physics and physical chemistry

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10.1088/0963-0252/23/4/045002

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Kemaneci, E. H., Carbone, E. A. D., Booth, J. P., Graef, W. A. A. D., Dijk, van, J., & Kroesen, G. M. W. (2014). Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas. Plasma Sources Science and Technology, 23(4), 045002-1/14. https://doi.org/10.1088/0963-0252/23/4/045002

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title = "Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas",

abstract = "An inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion–ion plasma appears. In order to model this phenomenon, a novel quasi-neutrality implementation is proposed. Several distinct Cl wall recombination probability measurements exist in the literature, and their effect on the simulation data is compared. We also investigated the effect of the gas temperature that was imposed over the range 300–1500 K, not calculated self-consistently. Comparison with published experimental data from several sources for both continuous and pulsed modes shows good agreement with the simulation results.",

keywords = "plasma physics, atomic and molecular physics, chemical physics and physical chemistry",

author = "E.H. Kemaneci and E.A.D. Carbone and J.P. Booth and W.A.A.D. Graef and {Dijk, van}, J. and G.M.W. Kroesen",

year = "2014",

month = aug,

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language = "English",

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journal = "Plasma Sources Science and Technology",

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Kemaneci, EH, Carbone, EAD, Booth, JP, Graef, WAAD , Dijk, van, J & Kroesen, GMW 2014, 'Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas', Plasma Sources Science and Technology, vol. 23, no. 4, pp. 045002-1/14. https://doi.org/10.1088/0963-0252/23/4/045002

Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas. / Kemaneci, E.H.; Carbone, E.A.D.; Booth, J.P. et al.
In: Plasma Sources Science and Technology, Vol. 23, No. 4, 08.2014, p. 045002-1/14.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

AU - Kemaneci, E.H.

AU - Carbone, E.A.D.

AU - Booth, J.P.

AU - Graef, W.A.A.D.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

PY - 2014/8

Y1 - 2014/8

N2 - An inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion–ion plasma appears. In order to model this phenomenon, a novel quasi-neutrality implementation is proposed. Several distinct Cl wall recombination probability measurements exist in the literature, and their effect on the simulation data is compared. We also investigated the effect of the gas temperature that was imposed over the range 300–1500 K, not calculated self-consistently. Comparison with published experimental data from several sources for both continuous and pulsed modes shows good agreement with the simulation results.

AB - An inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion–ion plasma appears. In order to model this phenomenon, a novel quasi-neutrality implementation is proposed. Several distinct Cl wall recombination probability measurements exist in the literature, and their effect on the simulation data is compared. We also investigated the effect of the gas temperature that was imposed over the range 300–1500 K, not calculated self-consistently. Comparison with published experimental data from several sources for both continuous and pulsed modes shows good agreement with the simulation results.

KW - plasma physics

KW - atomic and molecular physics

KW - chemical physics and physical chemistry

U2 - 10.1088/0963-0252/23/4/045002

DO - 10.1088/0963-0252/23/4/045002

M3 - Article

SN - 0963-0252

VL - 23

SP - 045002-1/14

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

IS - 4

ER -

Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

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