Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

E.H. Kemaneci; J. Dijk, van; G.M.W. Kroesen

Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

E.H. Kemaneci
, J. Dijk, van
, G.M.W. Kroesen

Research output: Contribution to conference › Poster

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Abstract

No abstract.

Original language	English
Publication status	Published - 2012
Event	15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012) - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 22 Nov 2012 → 23 Nov 2012 https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Guidelines__PMP__TuMo_/announcement.pdf

Workshop

Workshop	15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012)
Abbreviated title	WELTPP-15
Country/Territory	Netherlands
City	Kerkrade
Period	22/11/12 → 23/11/12
Internet address	https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Guidelines__PMP__TuMo_/announcement.pdf

Bibliographical note

Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands

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@conference{cbbb8931df824b1a91b5efd559aed34e,

title = "Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition",

abstract = "No abstract.",

author = "E.H. Kemaneci and \{Dijk, van\}, J. and G.M.W. Kroesen",

note = "Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands; 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), WELTPP-15 ; Conference date: 22-11-2012 Through 23-11-2012",

year = "2012",

language = "English",

url = "https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Guidelines\_\_PMP\_\_TuMo\_/announcement.pdf",

}

TY - CONF

T1 - Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

AU - Kemaneci, E.H.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

N1 - Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands

PY - 2012

Y1 - 2012

N2 - No abstract.

AB - No abstract.

M3 - Poster

T2 - 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012)

Y2 - 22 November 2012 through 23 November 2012

ER -

Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

Abstract

Workshop

Bibliographical note

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