Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

Research output: Contribution to conferencePosterAcademic

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Abstract

No abstract.
Original languageEnglish
Publication statusPublished - 2012
Event15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012) - Conference centre "Rolduc", Kerkrade, Netherlands
Duration: 22 Nov 201223 Nov 2012
https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Guidelines__PMP__TuMo_/announcement.pdf

Workshop

Workshop15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012)
Abbreviated titleWELTPP-15
CountryNetherlands
CityKerkrade
Period22/11/1223/11/12
Internet address

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Bibliographical note

Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands

Cite this

Kemaneci, E. H., Dijk, van, J., & Kroesen, G. M. W. (2012). Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition. Poster session presented at 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), Kerkrade, Netherlands.
Kemaneci, E.H. ; Dijk, van, J. ; Kroesen, G.M.W. / Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition. Poster session presented at 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), Kerkrade, Netherlands.
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title = "Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition",
abstract = "No abstract.",
author = "E.H. Kemaneci and {Dijk, van}, J. and G.M.W. Kroesen",
note = "Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands; 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), WELTPP-15 ; Conference date: 22-11-2012 Through 23-11-2012",
year = "2012",
language = "English",
url = "https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Guidelines__PMP__TuMo_/announcement.pdf",

}

Kemaneci, EH, Dijk, van, J & Kroesen, GMW 2012, 'Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition' 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), Kerkrade, Netherlands, 22/11/12 - 23/11/12, .

Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition. / Kemaneci, E.H.; Dijk, van, J.; Kroesen, G.M.W.

2012. Poster session presented at 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), Kerkrade, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition

AU - Kemaneci, E.H.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

N1 - Poster presented at the 15th workshop on the exploration of low temperature plasma physics (WELTPP 15), 22-23 November 2012, Kerkrade, The Netherlands

PY - 2012

Y1 - 2012

N2 - No abstract.

AB - No abstract.

M3 - Poster

ER -

Kemaneci EH, Dijk, van J, Kroesen GMW. Global model of microwave induced cylindrical O2/SiCl4 plasma column for SiO2 deposition. 2012. Poster session presented at 15th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2012), Kerkrade, Netherlands.