Global feedforward control of spatio-temporal mechanical systems: with application to a prototype wafer stage

Robin de Rozario, Robbert Voorhoeve, Wouter Aangenent, Tom Oomen

Research output: Contribution to journalConference articleAcademicpeer-review

2 Citations (Scopus)
59 Downloads (Pure)

Abstract

High throughput requirements on high-precision manufacturing systems lead to a situation where the flexible dynamics hamper the performance at the positions of interest. Since these points are typically not measured directly, high performance local control of measured positions may lead to deteriorated performance due to internal deformations. A possible solution is to employ a control strategy which ensures that the desired rigid body motion is achieved, without exciting the parasitic flexible dynamics. In this paper, a feedforward controller design procedure is developed that achieves this type of global performance, which in turn leads to increased performance at the unmeasured positions of interest. The proposed method is applied to an experimental wafer stage showing that the proposed approach indeed leads to superior results with respect to the traditional local control approach.

Original languageEnglish
Pages (from-to)14575-14580
Number of pages6
JournalIFAC-PapersOnLine
Volume50
Issue number1
DOIs
Publication statusPublished - 1 Jul 2017
Event20th World Congress of the International Federation of Automatic Control (IFAC 2017 World Congress) - Toulouse, France
Duration: 9 Jul 201714 Jul 2017
Conference number: 20
https://www.ifac2017.org/

Keywords

  • Feedforward
  • H control
  • Identification
  • Motion control
  • Spatial

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