@inproceedings{d63cc806e8f245ae9877756dca9386cf,
title = "Generic process for low-cost InP integrated photonics in industrial foundries",
author = "L.M. Augustin and H.P.M.M. Ambrosius and P.J.A. Thijs and N. Grote and M.J. Wale and M.K. Smit",
year = "2013",
language = "English",
isbn = "978-3-8007-3490-0",
booktitle = "Smart Systems Integration, 13-14 March 2013, Amsterdam, The Netherlands",
publisher = "VDE Verlag",
address = "Germany",
note = "Smart Systems Integration, March 13-14, 2013, Amsterdam, The Netherlands ; Conference date: 13-03-2013 Through 14-03-2013",
}