Gaussian Processes for Learning in Motion Control: Applied to Semiconductor Back-End Machines

Maurice Mathias Poot

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Mechanical Engineering
Supervisors/Advisors	Oomen, Tom A.E., Promotor Portegies, Jim W., Copromotor
Award date	3 Jul 2024
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-6062-2
Publication status	Published - 3 Jul 2024

Proefschrift.

Access to Document

@phdthesis{6291a888e4d0404b9b87e482c15b395b,

title = "Gaussian Processes for Learning in Motion Control: Applied to Semiconductor Back-End Machines",

author = "Poot, {Maurice Mathias}",

note = "Proefschrift.",

year = "2024",

month = jul,

day = "3",

language = "English",

isbn = "978-90-386-6062-2",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}