Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

K. Gielissen, Y. Sidelnikov, D. Glushkov, W.A. Soer, V.Y. Banine, J.J.A.M. Mullen, van der

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Abstract

The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. © 2009 American Institute of Physics.
Original languageEnglish
Article number083301
Pages (from-to)083301-1/6
Number of pages6
JournalJournal of Applied Physics
Volume106
Issue number8
DOIs
Publication statusPublished - 2009

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pinhole cameras
ions
oxygen ions
debris
plasma jets
energy
cathodes
kinetic energy
physics
electrodes
magnetic fields

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Gielissen, K. ; Sidelnikov, Y. ; Glushkov, D. ; Soer, W.A. ; Banine, V.Y. ; Mullen, van der, J.J.A.M. / Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation. In: Journal of Applied Physics. 2009 ; Vol. 106, No. 8. pp. 083301-1/6.
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Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation. / Gielissen, K.; Sidelnikov, Y.; Glushkov, D.; Soer, W.A.; Banine, V.Y.; Mullen, van der, J.J.A.M.

In: Journal of Applied Physics, Vol. 106, No. 8, 083301, 2009, p. 083301-1/6.

Research output: Contribution to journalArticleAcademicpeer-review

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