Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

K. Gielissen; Y. Sidelnikov; D. Glushkov; W.A. Soer; V.Y. Banine; J.J.A.M. Mullen, van der

doi:10.1063/1.3239994

Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

K. Gielissen, Y. Sidelnikov, D. Glushkov, W.A. Soer, V.Y. Banine, J.J.A.M. Mullen, van der

Research output: Contribution to journal › Article › Academic › peer-review

205 Downloads (Pure)

Abstract

The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. © 2009 American Institute of Physics.

Original language	English
Article number	083301
Pages (from-to)	083301-1/6
Number of pages	6
Journal	Journal of Applied Physics
Volume	106
Issue number	8
DOIs	https://doi.org/10.1063/1.3239994
Publication status	Published - 2009

Access to Document

10.1063/1.3239994

Metis231384Final published version, 383 KB

Cite this

@article{8d0d5dc6b55e498fa168100e083000c1,

title = "Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation",

abstract = "The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. {\textcopyright} 2009 American Institute of Physics.",

author = "K. Gielissen and Y. Sidelnikov and D. Glushkov and W.A. Soer and V.Y. Banine and {Mullen, van der}, J.J.A.M.",

year = "2009",

doi = "10.1063/1.3239994",

language = "English",

volume = "106",

pages = "083301--1/6",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

AU - Gielissen, K.

AU - Sidelnikov, Y.

AU - Glushkov, D.

AU - Soer, W.A.

AU - Banine, V.Y.

AU - Mullen, van der, J.J.A.M.

PY - 2009

Y1 - 2009

N2 - The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. © 2009 American Institute of Physics.

AB - The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. © 2009 American Institute of Physics.

U2 - 10.1063/1.3239994

DO - 10.1063/1.3239994

M3 - Article

SN - 0021-8979

VL - 106

SP - 083301-1/6

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8

M1 - 083301

ER -

Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

Abstract

Access to Document

Fingerprint

Cite this