Abstract
Onset times for coagulation of nanoparticles in chemical reactive low pressure Ar/C2H2 and Ar/CH4 radiofrequency (rf) discharges have been measured as a function of the gas temperature while either the gas pressure or the gas density was kept constant. As a diagnostic, the phase angle between rf voltage and rf current was monitored. The results demonstrate, within the temperature range 25¿°C–150¿°C, that for both gases coagulation is delayed significantly (by more than a factor of 10) for increasing temperatures. These results are explained in terms of the temperature dependence of the Brownian diffusion coefficient.
Original language | English |
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Article number | 123106 |
Pages (from-to) | 123106 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 103 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2013 |