Gas temperature dependence of coagulation onset times for nanoparticles in low pressure hydrocarbon plasmas

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Abstract

Onset times for coagulation of nanoparticles in chemical reactive low pressure Ar/C2H2 and Ar/CH4 radiofrequency (rf) discharges have been measured as a function of the gas temperature while either the gas pressure or the gas density was kept constant. As a diagnostic, the phase angle between rf voltage and rf current was monitored. The results demonstrate, within the temperature range 25¿°C–150¿°C, that for both gases coagulation is delayed significantly (by more than a factor of 10) for increasing temperatures. These results are explained in terms of the temperature dependence of the Brownian diffusion coefficient.
Original languageEnglish
Article number123106
Pages (from-to)123106
Number of pages3
JournalApplied Physics Letters
Volume103
Issue number12
DOIs
Publication statusPublished - 2013

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