Gas phase synthesis two ensembles of silicon nanoparticles

A. Mohan, M.M. Jong, I. Poulios, Ruud Schropp, J.K. Rath

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
4 Downloads (Pure)
Original languageEnglish
Article number375201
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume48
Issue number37
DOIs
Publication statusPublished - 23 Sep 2015

Keywords

  • free standing silicon nanoparticles
  • locally enhanced discharges
  • VHF-PECVD
  • TEM
  • Raman spectroscopy

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