Gas discharge plasmas and their applications

A. Bogaerts, E. Neyts, R. Gijbels, J.J.A.M. Mullen, van der

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Abstract

This paper attempts to give an overview of gas discharge plasmas in a broad perspective. It is meant for plasma spectroscopists who are familiar with analytical plasmas (glow discharges, ICPs and microwave discharges), but who are not so well aware of other applications of these and related plasmas. In the first part, an overview will be given of the various types of existing gas discharge plasmas, and their working principles will be briefly explained. In the second part, the most important applications will be outlined.
Original languageEnglish
Pages (from-to)609-658
JournalSpectrochimica Acta. Part B : Atomic Spectroscopy
Volume57
Issue number4
DOIs
Publication statusPublished - 2002

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