Fundamental aspects of reactions in titanium-silicon thin films for integrated circuits

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Brongersma, H.H., Promotor Saris, F.W., Promotor, External person
Award date	8 Nov 1988
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
DOIs	https://doi.org/10.6100/IR291927
Publication status	Published - 1988

Proefschrift.

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@phdthesis{19308a83137c4ea5975fc7b660c68d49,

title = "Fundamental aspects of reactions in titanium-silicon thin films for integrated circuits",

author = "I.J.M.M. Raaijmakers",

note = "Proefschrift.",

year = "1988",

doi = "10.6100/IR291927",

language = "English",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}