Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor

Z. Zobenica, R.W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y.J. Cho, F.W.M. van Otten, E. Verhagen, A. Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


We report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device.

Original languageEnglish
Title of host publicationOptical Sensors 2016, 18-20 July 2016, Vancouver, Canada
Subtitle of host publicationMicro- and Nano- Engineered Sensors I
Place of Publications.l.
PublisherOptical Society of America (OSA)
ISBN (Print)978-1-943580-14-9
Publication statusPublished - 1 Jan 2016
EventOptical Sensors, Sensors 2016 - Vancouver, Canada
Duration: 18 Jul 201620 Jul 2016


ConferenceOptical Sensors, Sensors 2016


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