Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor

Z. Zobenica; R.W. van der Heijden; M. Petruzzella; F. Pagliano; R. Leijssen; T. Xia; L. Midolo; M. Cotrufo; Y.J. Cho; F.W.M. van Otten; E. Verhagen; A. Fiore

Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor

Z. Zobenica, R.W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y.J. Cho, F.W.M. van Otten, E. Verhagen, A. Fiore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

We report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device.

Original language	English
Title of host publication	Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada
Subtitle of host publication	Micro- and Nano- Engineered Sensors I
Place of Publication	s.l.
Publisher	Optical Society of America (OSA)
Pages	1-3
ISBN (Print)	978-1-943580-14-9
Publication status	Published - 1 Jan 2016
Event	Optical Sensors, Sensors 2016 - Vancouver, Canada Duration: 18 Jul 2016 → 20 Jul 2016

Conference

Conference	Optical Sensors, Sensors 2016
Country	Canada
City	Vancouver
Period	18/07/16 → 20/07/16

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Zobenica, Z., van der Heijden, R. W., Petruzzella, M., Pagliano, F., Leijssen, R., Xia, T., Midolo, L., Cotrufo, M., Cho, Y. J., van Otten, F. W. M., Verhagen, E., & Fiore, A. (2016). Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor. In Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada: Micro- and Nano- Engineered Sensors I (pp. 1-3). [SeW2E.4] Optical Society of America (OSA).

Zobenica, Z. ; van der Heijden, R.W. ; Petruzzella, M. ; Pagliano, F. ; Leijssen, R. ; Xia, T. ; Midolo, L. ; Cotrufo, M. ; Cho, Y.J. ; van Otten, F.W.M. ; Verhagen, E. ; Fiore, A. / Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor. Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada: Micro- and Nano- Engineered Sensors I . s.l. : Optical Society of America (OSA), 2016. pp. 1-3

@inproceedings{0e39d49ca3d849bbac774a4e1d2e66bc,

title = "Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor",

abstract = "We report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device.",

author = "Z. Zobenica and {van der Heijden}, R.W. and M. Petruzzella and F. Pagliano and R. Leijssen and T. Xia and L. Midolo and M. Cotrufo and Y.J. Cho and {van Otten}, F.W.M. and E. Verhagen and A. Fiore",

year = "2016",

month = jan,

day = "1",

language = "English",

isbn = "978-1-943580-14-9",

pages = "1--3",

booktitle = "Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada",

publisher = "Optical Society of America (OSA)",

address = "United States",

note = "Optical Sensors, Sensors 2016 ; Conference date: 18-07-2016 Through 20-07-2016",

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Zobenica, Z, van der Heijden, RW , Petruzzella, M , Pagliano, F, Leijssen, R, Xia, T, Midolo, L, Cotrufo, M, Cho, YJ, van Otten, FWM, Verhagen, E & Fiore, A 2016, Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor. in Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada: Micro- and Nano- Engineered Sensors I ., SeW2E.4, Optical Society of America (OSA), s.l., pp. 1-3, Optical Sensors, Sensors 2016, Vancouver, Canada, 18/07/16.

Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor. / Zobenica, Z.; van der Heijden, R.W.; Petruzzella, M.; Pagliano, F.; Leijssen, R.; Xia, T.; Midolo, L.; Cotrufo, M.; Cho, Y.J.; van Otten, F.W.M.; Verhagen, E.; Fiore, A.

Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada: Micro- and Nano- Engineered Sensors I . s.l. : Optical Society of America (OSA), 2016. p. 1-3 SeW2E.4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Pagliano, F.

AU - Leijssen, R.

AU - Xia, T.

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AU - Cotrufo, M.

AU - Cho, Y.J.

AU - van Otten, F.W.M.

AU - Verhagen, E.

AU - Fiore, A.

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BT - Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada

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