Freeform optics measurements with the NANOMEFOS non-contact measurement machine

R. Henselmans; L.A. Cacace; G.F.IJ. Kramer; P.C.J.N. Rosielle; M. Steinbuch

Freeform optics measurements with the NANOMEFOS non-contact measurement machine

R. Henselmans
, L.A. Cacace
, G.F.IJ. Kramer
, P.C.J.N. Rosielle
, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.

Original language	English
Title of host publication	Proceedings of the SPIE Optifab 2009, 11-14 May 2009, Rochester, NY, USA
Place of Publication	United States, Rochester, NY
Publication status	Published - 2009

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Rosielle, P. C. J. N. (Manager)
Mechanical Engineering
Facility/equipment: Equipment

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title = "Freeform optics measurements with the NANOMEFOS non-contact measurement machine",

abstract = "The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.",

author = "R. Henselmans and L.A. Cacace and G.F.IJ. Kramer and P.C.J.N. Rosielle and M. Steinbuch",

year = "2009",

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T1 - Freeform optics measurements with the NANOMEFOS non-contact measurement machine

AU - Henselmans, R.

AU - Cacace, L.A.

AU - Kramer, G.F.IJ.

AU - Rosielle, P.C.J.N.

AU - Steinbuch, M.

PY - 2009

Y1 - 2009

N2 - The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.

AB - The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.

M3 - Conference contribution

BT - Proceedings of the SPIE Optifab 2009, 11-14 May 2009, Rochester, NY, USA

CY - United States, Rochester, NY

ER -

Freeform optics measurements with the NANOMEFOS non-contact measurement machine

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