Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective

Marcel Heertjes; Jazmin Zenteno Torres; Mohammad Al Janaideh

doi:10.1109/CDC49753.2023.10384162

Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective

Marcel Heertjes, Jazmin Zenteno Torres, Mohammad Al Janaideh

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The tracking accuracy in motion control systems like the moving stages in lithography machines, e.g., wafer scanners or metrology inspection tools, is partly determined by how the frequency content of its reference trajectories is transferred to the closed-loop tracking error. In this regard, fourth-order reference trajectories for point-to-point motion will be studied from a frequency-domain perspective. By appropriately pairing the maximum snap and maximum jerk values, weakly-damped modes in the closed-loop response can be robustly dealt with without introducing a penalty on throughput.

Original language	English
Title of host publication	2023 62nd IEEE Conference on Decision and Control, CDC 2023
Publisher	Institute of Electrical and Electronics Engineers
Pages	8696-8701
Number of pages	6
ISBN (Electronic)	979-8-3503-0124-3
DOIs	https://doi.org/10.1109/CDC49753.2023.10384162
Publication status	Published - 19 Jan 2024
Event	62nd IEEE Conference on Decision and Control, CDC 2023 - Singapore, Singapore Duration: 13 Dec 2023 → 15 Dec 2023 Conference number: 62

Conference

Conference	62nd IEEE Conference on Decision and Control, CDC 2023
Abbreviated title	CDC 2023
Country/Territory	Singapore
City	Singapore
Period	13/12/23 → 15/12/23

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10.1109/CDC49753.2023.10384162

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title = "Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective",

abstract = "The tracking accuracy in motion control systems like the moving stages in lithography machines, e.g., wafer scanners or metrology inspection tools, is partly determined by how the frequency content of its reference trajectories is transferred to the closed-loop tracking error. In this regard, fourth-order reference trajectories for point-to-point motion will be studied from a frequency-domain perspective. By appropriately pairing the maximum snap and maximum jerk values, weakly-damped modes in the closed-loop response can be robustly dealt with without introducing a penalty on throughput.",

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Heertjes, M, Torres, JZ & Al Janaideh, M 2024, Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective. in 2023 62nd IEEE Conference on Decision and Control, CDC 2023., 10384162, Institute of Electrical and Electronics Engineers, pp. 8696-8701, 62nd IEEE Conference on Decision and Control, CDC 2023, Singapore, Singapore, 13/12/23. https://doi.org/10.1109/CDC49753.2023.10384162

Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective. / Heertjes, Marcel; Torres, Jazmin Zenteno; Al Janaideh, Mohammad.
2023 62nd IEEE Conference on Decision and Control, CDC 2023. Institute of Electrical and Electronics Engineers, 2024. p. 8696-8701 10384162.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - The tracking accuracy in motion control systems like the moving stages in lithography machines, e.g., wafer scanners or metrology inspection tools, is partly determined by how the frequency content of its reference trajectories is transferred to the closed-loop tracking error. In this regard, fourth-order reference trajectories for point-to-point motion will be studied from a frequency-domain perspective. By appropriately pairing the maximum snap and maximum jerk values, weakly-damped modes in the closed-loop response can be robustly dealt with without introducing a penalty on throughput.

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Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective

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