Four ways to determine the electron density in low-temperature plasmas

R.F.G. Meulenbroeks, M.F.M. Steenbakkers, Z. Qing, M.C.M. Sanden, van de, D.C. Schram

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Four ways to measure the electron density in low-temperature plasmas are presented: Thomson scattering, Langmuir probe, optical-emission spectroscopy, and continuum-radiation analysis. The results of the four methods are compared to each other and discussed. For the electron-density range of 10/sup 19/-10/sup 21/m/sup -3/, Thomson scattering proved to give the most accurate results (within a few percent); the Langmuir-probe measurements also proved acceptable (25%). A collisional-radiative model fit through excited-level populations and continuum analysis yields results in good agreement with Thomson scattering data, although with larger margins of error (around 40%). A simple Saha fit proved to be inadequate
Original languageEnglish
Pages (from-to)2272-2275
JournalPhysical Review E: Statistical, Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Issue number3
Publication statusPublished - 1994


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