Formation of watermark defects during immersion lithography

Bojia He

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

71 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Darhuber, Anton A., Promotor
  • van der Schoot, Paul P.A.M., Promotor
Award date9 Mar 2020
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5004-3
Publication statusPublished - 9 Mar 2020

Bibliographical note

Proefschrift.

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