Formation of nanocrystalline BaTiO3 thin films by pulsed laser deposition

Zakhar Vakulov; Kseniia Korzun; Roman V. Tominov; Vladimir A. Smirnov; Oleg A. Ageev

doi:10.1117/12.2624410

Formation of nanocrystalline BaTiO₃ thin films by pulsed laser deposition

Zakhar Vakulov, Kseniia Korzun, Roman V. Tominov, Vladimir A. Smirnov, Oleg A. Ageev

Advanced Nanomaterials & Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

The paper shows the experimental results of the substrate temperature effect on the morphological and electro-physical parameters of nanocrystalline BaTiO₃ films fabricated by pulsed laser deposition. It was found increasing in the substrate temperature from 300 °C to 600 °C results in decreasing in surface roughness from (6.1±0.6) nm to (0.8±0.1) nm and increasing in the films grain size from (39.1±3.1) nm to (212.1± 17.2) nm. Increasing in the substrate temperature leads to a change in electro-physical parameters: the concentration of charge carriers increases from (1.85±0.16)×10¹³ cm^-3 to (2.77±0.25)×10¹³ cm^-3, the mobility of charge carriers decreases from (10.1±0.9) cm²/(V·s) to (7.2±0.6) cm²/(V·s), and the resistivity of the films changes insignificantly from (3.4±0.2)×10³ Ω·cm to (3.1±0.2)×10³ Ω·cm under increase in the temperature from 300 °C to 600 °C. The obtained results make it possible to get BaTiO₃ films with target parameters, which can be used to develop promising lead-free energy harvesters for alternative energy devices.

Original language	English
Title of host publication	International Conference on Micro- and Nano-Electronics 2021
Editors	Vladimir F. Lukichev, Konstantin V. Rudenko
Publisher	SPIE
Number of pages	7
ISBN (Electronic)	9781510651913
ISBN (Print)	9781510651906
DOIs	https://doi.org/10.1117/12.2624410
Publication status	Published - 2022
Event	14th International Conference on Micro- and Nano-Electronics 2021, ICMNE 2021 - Zvenigorod, Russian Federation Duration: 4 Oct 2021 → 8 Oct 2021

Publication series

Name	Proceedings of SPIE
Volume	12157
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	14th International Conference on Micro- and Nano-Electronics 2021, ICMNE 2021
Country/Territory	Russian Federation
City	Zvenigorod
Period	4/10/21 → 8/10/21

Bibliographical note

Funding Information:
The reported study was funded by the Russian Foundation for Basic Research, projects numbers 19-38-60052, 18-29-11019 mk, and 19-29-03041 mk, and partially supported by Grant of the President of the Russian Federation MK-6252.2021.4. The work was done on the equipment of the Research and Education Center “Nanotechnology”, Southern Federal University.

Funding

The reported study was funded by the Russian Foundation for Basic Research, projects numbers 19-38-60052, 18-29-11019 mk, and 19-29-03041 mk, and partially supported by Grant of the President of the Russian Federation MK-6252.2021.4. The work was done on the equipment of the Research and Education Center “Nanotechnology”, Southern Federal University.

Keywords

Barium titanate
Lead-free ferroelectrics
Nanotechnology
Pulsed laser deposition
Substrate temperature
Thin films

Access to Document

10.1117/12.2624410

Cite this

@inproceedings{ec55070171bb43c2be87fd7650f326c6,

title = "Formation of nanocrystalline BaTiO3 thin films by pulsed laser deposition",

abstract = "The paper shows the experimental results of the substrate temperature effect on the morphological and electro-physical parameters of nanocrystalline BaTiO3 films fabricated by pulsed laser deposition. It was found increasing in the substrate temperature from 300 °C to 600 °C results in decreasing in surface roughness from (6.1±0.6) nm to (0.8±0.1) nm and increasing in the films grain size from (39.1±3.1) nm to (212.1± 17.2) nm. Increasing in the substrate temperature leads to a change in electro-physical parameters: the concentration of charge carriers increases from (1.85±0.16)×1013 cm-3 to (2.77±0.25)×1013 cm-3, the mobility of charge carriers decreases from (10.1±0.9) cm2/(V·s) to (7.2±0.6) cm2/(V·s), and the resistivity of the films changes insignificantly from (3.4±0.2)×103 Ω·cm to (3.1±0.2)×103 Ω·cm under increase in the temperature from 300 °C to 600 °C. The obtained results make it possible to get BaTiO3 films with target parameters, which can be used to develop promising lead-free energy harvesters for alternative energy devices.",

keywords = "Barium titanate, Lead-free ferroelectrics, Nanotechnology, Pulsed laser deposition, Substrate temperature, Thin films",

author = "Zakhar Vakulov and Kseniia Korzun and Tominov, {Roman V.} and Smirnov, {Vladimir A.} and Ageev, {Oleg A.}",

note = "Funding Information: The reported study was funded by the Russian Foundation for Basic Research, projects numbers 19-38-60052, 18-29-11019 mk, and 19-29-03041 mk, and partially supported by Grant of the President of the Russian Federation MK-6252.2021.4. The work was done on the equipment of the Research and Education Center “Nanotechnology”, Southern Federal University. ; 14th International Conference on Micro- and Nano-Electronics 2021, ICMNE 2021 ; Conference date: 04-10-2021 Through 08-10-2021",

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language = "English",

isbn = "9781510651906",

series = "Proceedings of SPIE ",

publisher = "SPIE",

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booktitle = "International Conference on Micro- and Nano-Electronics 2021",

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Vakulov, Z, Korzun, K, Tominov, RV, Smirnov, VA & Ageev, OA 2022, Formation of nanocrystalline BaTiO₃ thin films by pulsed laser deposition. in VF Lukichev & KV Rudenko (eds), International Conference on Micro- and Nano-Electronics 2021., 121571J, Proceedings of SPIE , vol. 12157, SPIE, 14th International Conference on Micro- and Nano-Electronics 2021, ICMNE 2021, Zvenigorod, Russian Federation, 4/10/21. https://doi.org/10.1117/12.2624410

Formation of nanocrystalline BaTiO₃ thin films by pulsed laser deposition. / Vakulov, Zakhar; Korzun, Kseniia; Tominov, Roman V. et al.
International Conference on Micro- and Nano-Electronics 2021. ed. / Vladimir F. Lukichev; Konstantin V. Rudenko. SPIE, 2022. 121571J (Proceedings of SPIE ; Vol. 12157).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Formation of nanocrystalline BaTiO3 thin films by pulsed laser deposition

AU - Vakulov, Zakhar

AU - Korzun, Kseniia

AU - Tominov, Roman V.

AU - Smirnov, Vladimir A.

AU - Ageev, Oleg A.

N1 - Funding Information: The reported study was funded by the Russian Foundation for Basic Research, projects numbers 19-38-60052, 18-29-11019 mk, and 19-29-03041 mk, and partially supported by Grant of the President of the Russian Federation MK-6252.2021.4. The work was done on the equipment of the Research and Education Center “Nanotechnology”, Southern Federal University.

PY - 2022

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N2 - The paper shows the experimental results of the substrate temperature effect on the morphological and electro-physical parameters of nanocrystalline BaTiO3 films fabricated by pulsed laser deposition. It was found increasing in the substrate temperature from 300 °C to 600 °C results in decreasing in surface roughness from (6.1±0.6) nm to (0.8±0.1) nm and increasing in the films grain size from (39.1±3.1) nm to (212.1± 17.2) nm. Increasing in the substrate temperature leads to a change in electro-physical parameters: the concentration of charge carriers increases from (1.85±0.16)×1013 cm-3 to (2.77±0.25)×1013 cm-3, the mobility of charge carriers decreases from (10.1±0.9) cm2/(V·s) to (7.2±0.6) cm2/(V·s), and the resistivity of the films changes insignificantly from (3.4±0.2)×103 Ω·cm to (3.1±0.2)×103 Ω·cm under increase in the temperature from 300 °C to 600 °C. The obtained results make it possible to get BaTiO3 films with target parameters, which can be used to develop promising lead-free energy harvesters for alternative energy devices.

AB - The paper shows the experimental results of the substrate temperature effect on the morphological and electro-physical parameters of nanocrystalline BaTiO3 films fabricated by pulsed laser deposition. It was found increasing in the substrate temperature from 300 °C to 600 °C results in decreasing in surface roughness from (6.1±0.6) nm to (0.8±0.1) nm and increasing in the films grain size from (39.1±3.1) nm to (212.1± 17.2) nm. Increasing in the substrate temperature leads to a change in electro-physical parameters: the concentration of charge carriers increases from (1.85±0.16)×1013 cm-3 to (2.77±0.25)×1013 cm-3, the mobility of charge carriers decreases from (10.1±0.9) cm2/(V·s) to (7.2±0.6) cm2/(V·s), and the resistivity of the films changes insignificantly from (3.4±0.2)×103 Ω·cm to (3.1±0.2)×103 Ω·cm under increase in the temperature from 300 °C to 600 °C. The obtained results make it possible to get BaTiO3 films with target parameters, which can be used to develop promising lead-free energy harvesters for alternative energy devices.

KW - Barium titanate

KW - Lead-free ferroelectrics

KW - Nanotechnology

KW - Pulsed laser deposition

KW - Substrate temperature

KW - Thin films

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BT - International Conference on Micro- and Nano-Electronics 2021

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