Formation and expansion phases of an atmospheric pressure glow discharge in a PECVD reactor via fast ICCD imaging

S.A. Starostin, M.A.M. ElSabbagh, E. Aldea, H.W. Vries, de, M. Creatore, M.C.M. Sanden, van de

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Abstract

This paper reports on the experimental study of the dynamic evolution of a dielectric barrier discharge in an atmospheric-pressure plasma enhanced chemical vapor deposition reactor using a gated intensified charge coupled detector. It is observed that a diffuse atmospheric pressure glow is formed via transition from Townsend-like discharge or, alternatively, can be initiated by a filamentary discharge. The formation of the glow current spot is followed by the lateral expansion of the discharge.
Original languageEnglish
Pages (from-to)968-969
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4
DOIs
Publication statusPublished - 2008

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