Abstract
Time resolved process of formation and evolution of the atmospheric pressure glow
discharge was studied in the roll-to- roll plasma- enhanced chemical vapor deposition dielectric barrier discharge reactor operating in helium-free gas mixtures by means of fast ICCD imaging. It was observed that the discharge gradually experiences Townsend-like, transient positive streamer and expanding glow phases.
Original language | English |
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Title of host publication | Proceedings of the 11th International Symposium on High Pressure, Low Temperature Plasma (Hakone XI) 7-12 September 2008, Oleron Island, France |
Pages | 90-90 |
Publication status | Published - 2008 |