Abstract
The ultra-cold ion (UCI) source is based on creating very cold ion beams by nearthreshold
photo-ionization of a laser-cooled and trapped atomic gas. The UCI source has
the potential of producing ion beams with a brightness and current comparable to the
liquid-metal ion source (LMIS) [1], which is the current state-of-art for focused ion beam
(FIB) technology. We have already shown [2] that the UCI source can provide much
lower energy spread than LMIS, and may therefore offer a route toward 1-nm ion beam
milling [3].
Original language | English |
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Title of host publication | 13th ICIS International Conference on Ion Sources, Gatlinburg, Tennessee, USA, 21-25 September 2009 |
Pages | M7-145- |
Publication status | Published - 2009 |