In the Eindhoven coincident elastic recoil detection analysis by time-of-flight (CERDA-TOF) spectrometer we have improved sensitivity by focusing the recoils onto the detector by a magnetic quadrupole doublet. In order not to disturb the depth resolution, the focusing was limited to the azimuthal direction, perpendicular to the scattering plane (reaction plane). Sensitivity improves by a factor of 5 to about 1 × 1014 atoms/cm2 for carbon in a carbon foil and by a factor of 4 to 1 × 1014 atoms/cm2 for oxygen in a native oxide layer on a 1 μm amorphous Si-layer.
|Number of pages||5|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - Sep 1996|