Flying capacitor resonant pole inverter applying five voltage levels

S.J. Settels; J.L. Duarte; J. van Duivenbode; E.A. Lomonova

Flying capacitor resonant pole inverter applying five voltage levels

S.J. Settels, J.L. Duarte, J. van Duivenbode, E.A. Lomonova

Research output: Contribution to conference › Poster

1 Downloads (Pure)

Abstract

Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

Original language	English
Publication status	Published - 4 Oct 2017
Event	9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017) - Cincinnati, United States Duration: 1 Oct 2017 → 5 Oct 2017 Conference number: 9 http://www.ieee-ecce.org/2017

Conference

Conference	9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017)
Abbreviated title	ECCE 2017
Country/Territory	United States
City	Cincinnati
Period	1/10/17 → 5/10/17
Internet address	http://www.ieee-ecce.org/2017

1 Contributed talk

9th Annual IEEE Energy Conversion Congress and Exposition 2017 (ECCE America), 1-5 October 2017, Cincinnati, USA
Settels, S. (Speaker)
4 Oct 2017
Activity: Talk or presentation types › Contributed talk › Scientific

1 Conference contribution

Flying capacitor resonant pole inverter applying five voltage levels
Settels, S. J., van Duivenbode, J., Duarte, J. L. & Lomonova, E. A., 3 Nov 2017, 2017 IEEE Energy Conversion Congress and Exposition, ECCE 2017. Piscataway: Institute of Electrical and Electronics Engineers, Vol. 2017-January. p. 2121-2128 8 p. 8096420
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
5 Citations (Scopus)

5 Downloads (Pure)

Cite this

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title = "Flying capacitor resonant pole inverter applying five voltage levels",

abstract = "Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.",

author = "S.J. Settels and J.L. Duarte and {van Duivenbode}, J. and E.A. Lomonova",

year = "2017",

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language = "English",

note = "9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), ECCE 2017 ; Conference date: 01-10-2017 Through 05-10-2017",

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TY - CONF

T1 - Flying capacitor resonant pole inverter applying five voltage levels

AU - Settels, S.J.

AU - Duarte, J.L.

AU - van Duivenbode, J.

AU - Lomonova, E.A.

N1 - Conference code: 9

PY - 2017/10/4

Y1 - 2017/10/4

N2 - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

AB - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

M3 - Poster

T2 - 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017)

Y2 - 1 October 2017 through 5 October 2017

ER -

Flying capacitor resonant pole inverter applying five voltage levels

Abstract

Conference

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Activities

9th Annual IEEE Energy Conversion Congress and Exposition 2017 (ECCE America), 1-5 October 2017, Cincinnati, USA

Research output

Flying capacitor resonant pole inverter applying five voltage levels

Cite this