Flying capacitor resonant pole inverter applying five voltage levels

Research output: Contribution to conferencePosterAcademic

Abstract

Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

Conference

Conference9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017)
Abbreviated titleECCE 2017
CountryUnited States
CityCincinnati
Period1/10/175/10/17
Internet address

Fingerprint

Power amplifiers
Poles
Capacitors
Electric potential
Thermal load
Actuators

Cite this

Settels, S. J., Duarte, J. L., van Duivenbode, J., & Lomonova, E. A. (2017). Flying capacitor resonant pole inverter applying five voltage levels. Poster session presented at 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, United States.
Settels, S.J. ; Duarte, J.L. ; van Duivenbode, J. ; Lomonova, E.A./ Flying capacitor resonant pole inverter applying five voltage levels. Poster session presented at 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, United States.
@conference{63b883e454b0451cbc3fbbcf56f617bc,
title = "Flying capacitor resonant pole inverter applying five voltage levels",
abstract = "Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.",
author = "S.J. Settels and J.L. Duarte and {van Duivenbode}, J. and E.A. Lomonova",
year = "2017",
month = "10",
day = "4",
language = "English",
note = "9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), ECCE 2017 ; Conference date: 01-10-2017 Through 05-10-2017",
url = "http://www.ieee-ecce.org/2017",

}

Settels, SJ, Duarte, JL, van Duivenbode, J & Lomonova, EA 2017, 'Flying capacitor resonant pole inverter applying five voltage levels' 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, United States, 1/10/17 - 5/10/17, .

Flying capacitor resonant pole inverter applying five voltage levels. / Settels, S.J.; Duarte, J.L.; van Duivenbode, J.; Lomonova, E.A.

2017. Poster session presented at 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, United States.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Flying capacitor resonant pole inverter applying five voltage levels

AU - Settels,S.J.

AU - Duarte,J.L.

AU - van Duivenbode,J.

AU - Lomonova,E.A.

PY - 2017/10/4

Y1 - 2017/10/4

N2 - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

AB - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

M3 - Poster

ER -

Settels SJ, Duarte JL, van Duivenbode J, Lomonova EA. Flying capacitor resonant pole inverter applying five voltage levels. 2017. Poster session presented at 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, United States.