Flying capacitor resonant pole inverter applying five voltage levels

Research output: Contribution to conferencePosterAcademic

Abstract

Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.
Original languageEnglish
Publication statusPublished - 4 Oct 2017
Event9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017) - Cincinnati, United States
Duration: 1 Oct 20175 Oct 2017
Conference number: 9
http://www.ieee-ecce.org/2017

Conference

Conference9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017)
Abbreviated titleECCE 2017
CountryUnited States
CityCincinnati
Period1/10/175/10/17
Internet address

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