Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane

Ashutosh Kumar Tripathi, Bas Van Der Putten, Jan Laurens Van Der Steen, Karin Tempelaars, Brian Cobb, Marc Ameys, Tung Huei Ke, Kris Myny, Soeren Steudel, Manoj Nag, Sarah Schols, Peter Vicca, Steve Smout, Jan Genoe, Paul Heremans, Iryna Yakimets, Gerwin Gelinck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.

Original languageEnglish
Title of host publicationSociety for Information Display - 19th International Display Workshops 2012, IDW/AD 2012
Pages1782-1785
Number of pages4
Volume3
Publication statusPublished - 1 Dec 2012
Event19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012 - Kyoto, Japan
Duration: 4 Dec 20127 Dec 2012

Conference

Conference19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012
CountryJapan
CityKyoto
Period4/12/127/12/12

Keywords

  • AMOLED
  • Displays
  • Flexible
  • Low-temperature
  • Metal-oxide semiconductors

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    Tripathi, A. K., Van Der Putten, B., Van Der Steen, J. L., Tempelaars, K., Cobb, B., Ameys, M., Ke, T. H., Myny, K., Steudel, S., Nag, M., Schols, S., Vicca, P., Smout, S., Genoe, J., Heremans, P., Yakimets, I., & Gelinck, G. (2012). Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane. In Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012 (Vol. 3, pp. 1782-1785)