Abstract
We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.
Original language | English |
---|---|
Title of host publication | Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012 |
Pages | 1782-1785 |
Number of pages | 4 |
Volume | 3 |
Publication status | Published - 1 Dec 2012 |
Event | 19th International Display Workshops in Conjunction with Asia Display (IDW 2012) - Kyoto, Japan Duration: 4 Dec 2012 → 7 Dec 2012 Conference number: 19 |
Conference
Conference | 19th International Display Workshops in Conjunction with Asia Display (IDW 2012) |
---|---|
Abbreviated title | IDW 2012 |
Country/Territory | Japan |
City | Kyoto |
Period | 4/12/12 → 7/12/12 |
Keywords
- AMOLED
- Displays
- Flexible
- Low-temperature
- Metal-oxide semiconductors