Flexible a-IGZO TFT technology: new developments & applications

Auke Jisk Kronemeijer; Ilias Katsouras; Paul Poodt; Hylke Akkerman; Albert van Breemen; Gerwin Gelinck

doi:10.23919/AM-FPD.2018.8437444

Flexible a-IGZO TFT technology: new developments & applications

Auke Jisk Kronemeijer
, Ilias Katsouras
, Paul Poodt
, Hylke Akkerman
, Albert van Breemen
, Gerwin Gelinck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

Abstract

We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection.

Original language	English
Title of host publication	AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publication	TFT Technologies and FPD Materials, Proceedings
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	4
ISBN (Print)	9784990875350
DOIs	https://doi.org/10.23919/AM-FPD.2018.8437444
Publication status	Published - 2018
Event	25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018 - Kyoto, Japan Duration: 3 Jul 2018 → 6 Jul 2018

Conference

Conference	25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018
Country/Territory	Japan
City	Kyoto
Period	3/07/18 → 6/07/18

Funding

This work was carried out in the frame of the Holst Centre, a joint collaboration between IMEC and TNO, and financed through the Flexlines project within the Interreg V-programme Flanders-The Netherlands, a cross-border cooperation programme with financial support from the European Regional Development Fund. We gratefully thank Fred Roozeboom and Andrea Illiberi with regards to the S-ALD work and the process engineers of Holst Centre’s GEN1 TFT Pilot Line in Eindhoven, the Netherlands, for fabrication of the transistors and TFT backplanes.

Access to Document

10.23919/AM-FPD.2018.8437444

Cite this

Kronemeijer, A. J., Katsouras, I., Poodt, P., Akkerman, H., van Breemen, A., & Gelinck, G. (2018). Flexible a-IGZO TFT technology: new developments & applications. In AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings Article 8437444 Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/AM-FPD.2018.8437444

@inproceedings{a9977918bfec463bb9c8ef38633c11bc,

title = "Flexible a-IGZO TFT technology: new developments \& applications",

abstract = "We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection.",

author = "Kronemeijer, \{Auke Jisk\} and Ilias Katsouras and Paul Poodt and Hylke Akkerman and \{van Breemen\}, Albert and Gerwin Gelinck",

year = "2018",

doi = "10.23919/AM-FPD.2018.8437444",

language = "English",

isbn = "9784990875350",

booktitle = "AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018 ; Conference date: 03-07-2018 Through 06-07-2018",

}

Kronemeijer, AJ, Katsouras, I, Poodt, P, Akkerman, H, van Breemen, A & Gelinck, G 2018, Flexible a-IGZO TFT technology: new developments & applications. in AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings., 8437444, Institute of Electrical and Electronics Engineers, Piscataway, 25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018, Kyoto, Japan, 3/07/18. https://doi.org/10.23919/AM-FPD.2018.8437444

Flexible a-IGZO TFT technology: new developments & applications. / Kronemeijer, Auke Jisk; Katsouras, Ilias; Poodt, Paul et al.
AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Piscataway: Institute of Electrical and Electronics Engineers, 2018. 8437444.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Flexible a-IGZO TFT technology

T2 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018

AU - Kronemeijer, Auke Jisk

AU - Katsouras, Ilias

AU - Poodt, Paul

AU - Akkerman, Hylke

AU - van Breemen, Albert

AU - Gelinck, Gerwin

PY - 2018

Y1 - 2018

N2 - We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection.

AB - We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection.

UR - https://www.scopus.com/pages/publications/85053121391

U2 - 10.23919/AM-FPD.2018.8437444

DO - 10.23919/AM-FPD.2018.8437444

M3 - Conference contribution

AN - SCOPUS:85053121391

SN - 9784990875350

BT - AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

Y2 - 3 July 2018 through 6 July 2018

ER -

Kronemeijer AJ, Katsouras I, Poodt P, Akkerman H, van Breemen A, Gelinck G. Flexible a-IGZO TFT technology: new developments & applications. In AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Piscataway: Institute of Electrical and Electronics Engineers. 2018. 8437444 doi: 10.23919/AM-FPD.2018.8437444

Flexible a-IGZO TFT technology: new developments & applications

Abstract

Conference

Funding

Access to Document

Other files and links

Fingerprint

Cite this