Flexible a-IGZO TFT technology: new developments & applications

Auke Jisk Kronemeijer, Ilias Katsouras, Paul Poodt, Hylke Akkerman, Albert van Breemen, Gerwin Gelinck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Abstract

We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection.

LanguageEnglish
Title of host publicationAM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials, Proceedings
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages4
ISBN (Print)9784990875350
DOIs
StatePublished - 2018
Event25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018 - Kyoto, Japan
Duration: 3 Jul 20186 Jul 2018

Conference

Conference25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018
CountryJapan
CityKyoto
Period3/07/186/07/18

Fingerprint

scaling
compatibility
Flexible displays
Nanoimprint lithography
lithography
manufacturing
costs
optimization
electric potential
Display devices
Electric potential
Processing
Costs

Cite this

Kronemeijer, A. J., Katsouras, I., Poodt, P., Akkerman, H., van Breemen, A., & Gelinck, G. (2018). Flexible a-IGZO TFT technology: new developments & applications. In AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings [8437444] Piscataway: Institute of Electrical and Electronics Engineers. DOI: 10.23919/AM-FPD.2018.8437444
Kronemeijer, Auke Jisk ; Katsouras, Ilias ; Poodt, Paul ; Akkerman, Hylke ; van Breemen, Albert ; Gelinck, Gerwin. / Flexible a-IGZO TFT technology : new developments & applications. AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Piscataway : Institute of Electrical and Electronics Engineers, 2018.
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Kronemeijer, AJ, Katsouras, I, Poodt, P, Akkerman, H, van Breemen, A & Gelinck, G 2018, Flexible a-IGZO TFT technology: new developments & applications. in AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings., 8437444, Institute of Electrical and Electronics Engineers, Piscataway, 25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018, Kyoto, Japan, 3/07/18. DOI: 10.23919/AM-FPD.2018.8437444

Flexible a-IGZO TFT technology : new developments & applications. / Kronemeijer, Auke Jisk; Katsouras, Ilias; Poodt, Paul; Akkerman, Hylke; van Breemen, Albert; Gelinck, Gerwin.

AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Piscataway : Institute of Electrical and Electronics Engineers, 2018. 8437444.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Kronemeijer AJ, Katsouras I, Poodt P, Akkerman H, van Breemen A, Gelinck G. Flexible a-IGZO TFT technology: new developments & applications. In AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Piscataway: Institute of Electrical and Electronics Engineers. 2018. 8437444. Available from, DOI: 10.23919/AM-FPD.2018.8437444