First-principles investigation of an epitaxial silicon oxynitride layer on a 6H-SiC (0001) surface

P. Krüger, B. Baumeier, J. Pollmann

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)

Fingerprint Dive into the research topics of 'First-principles investigation of an epitaxial silicon oxynitride layer on a 6H-SiC (0001) surface'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy