First performance results of the ASML alplia demo tool

Hans Meiling, Henk Meijer, Vadim Banine, Roel Moors, Regier Groeneveld, Harm Jan Voorma, Uwe Mickan, Bas Wolschrijn, Bas Mertens, Gregor van Baars, Peter Kürz, Noreen Harned

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

95 Citations (Scopus)

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