First-ever measurements of ion energy distribution functions in EUV induced plasma

T.H.M. van de Ven; P. Reefman; E.A. Osorio; V.Y. Banine; J. Beckers

First-ever measurements of ion energy distribution functions in EUV induced plasma

T.H.M. van de Ven
, P. Reefman
, E.A. Osorio
, V.Y. Banine
, J. Beckers

Research output: Contribution to conference › Poster

136 Downloads (Pure)

Original language	English
Publication status	Published - 16 Mar 2016
Event	28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands - Congress Hotel 'De Werelt', Lunteren, Netherlands Duration: 15 Mar 2016 → 16 Mar 2016 http://www.plasmalunteren.nl/

Conference

Conference	28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands
Country/Territory	Netherlands
City	Lunteren
Period	15/03/16 → 16/03/16
Internet address	http://www.plasmalunteren.nl/

Access to Document

THMvdVen_2016_NNVPlasmaSymposiumLunterenFinal published version, 3.01 MBLicence: Other

Cite this

@conference{2241fd31cda448088199cafeaf78e755,

title = "First-ever measurements of ion energy distribution functions in EUV induced plasma",

keywords = "EUV induced plasma, Mass spectrometry, ion energy distribution function",

author = "\{van de Ven\}, T.H.M. and P. Reefman and E.A. Osorio and V.Y. Banine and J. Beckers",

year = "2016",

month = mar,

day = "16",

language = "English",

note = "28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands ; Conference date: 15-03-2016 Through 16-03-2016",

url = "http://www.plasmalunteren.nl/",

}

TY - CONF

T1 - First-ever measurements of ion energy distribution functions in EUV induced plasma

AU - van de Ven, T.H.M.

AU - Reefman, P.

AU - Osorio, E.A.

AU - Banine, V.Y.

AU - Beckers, J.

PY - 2016/3/16

Y1 - 2016/3/16

KW - EUV induced plasma

KW - Mass spectrometry

KW - ion energy distribution function

M3 - Poster

T2 - 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands

Y2 - 15 March 2016 through 16 March 2016

ER -