First-ever measurements of ion energy distribution functions in EUV induced plasma

T.H.M. van de Ven, P. Reefman, E.A. Osorio, V.Y. Banine, J. Beckers

Research output: Contribution to conferencePosterAcademic

Conference

Conference28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period15/03/1616/03/16
Internet address

Keywords

    Cite this

    van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y., & Beckers, J. (2016). First-ever measurements of ion energy distribution functions in EUV induced plasma. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.
    van de Ven, T.H.M. ; Reefman, P. ; Osorio, E.A. ; Banine, V.Y. ; Beckers, J./ First-ever measurements of ion energy distribution functions in EUV induced plasma. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.
    @conference{2241fd31cda448088199cafeaf78e755,
    title = "First-ever measurements of ion energy distribution functions in EUV induced plasma",
    keywords = "EUV induced plasma, Mass spectrometry, ion energy distribution function",
    author = "{van de Ven}, T.H.M. and P. Reefman and E.A. Osorio and V.Y. Banine and J. Beckers",
    year = "2016",
    month = "3",
    day = "16",
    language = "English",
    note = "28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands ; Conference date: 15-03-2016 Through 16-03-2016",
    url = "http://www.plasmalunteren.nl/",

    }

    van de Ven, THM, Reefman, P, Osorio, EA, Banine, VY & Beckers, J 2016, 'First-ever measurements of ion energy distribution functions in EUV induced plasma' 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands, 15/03/16 - 16/03/16, .

    First-ever measurements of ion energy distribution functions in EUV induced plasma. / van de Ven, T.H.M.; Reefman, P.; Osorio, E.A.; Banine, V.Y.; Beckers, J.

    2016. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.

    Research output: Contribution to conferencePosterAcademic

    TY - CONF

    T1 - First-ever measurements of ion energy distribution functions in EUV induced plasma

    AU - van de Ven,T.H.M.

    AU - Reefman,P.

    AU - Osorio,E.A.

    AU - Banine,V.Y.

    AU - Beckers,J.

    PY - 2016/3/16

    Y1 - 2016/3/16

    KW - EUV induced plasma

    KW - Mass spectrometry

    KW - ion energy distribution function

    M3 - Poster

    ER -

    van de Ven THM, Reefman P, Osorio EA, Banine VY, Beckers J. First-ever measurements of ion energy distribution functions in EUV induced plasma. 2016. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.