First-ever measurements of ion energy distribution functions in EUV induced plasma

T.H.M. van de Ven, P. Reefman, E.A. Osorio, V.Y. Banine, J. Beckers

Research output: Contribution to conferencePosterAcademic

62 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 16 Mar 2016
Event28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands - Congress Hotel 'De Werelt', Lunteren, Netherlands
Duration: 15 Mar 201616 Mar 2016
http://www.plasmalunteren.nl/

Conference

Conference28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period15/03/1616/03/16
Internet address

Cite this

van de Ven, T. H. M., Reefman, P., Osorio, E. A., Banine, V. Y., & Beckers, J. (2016). First-ever measurements of ion energy distribution functions in EUV induced plasma. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.
van de Ven, T.H.M. ; Reefman, P. ; Osorio, E.A. ; Banine, V.Y. ; Beckers, J. / First-ever measurements of ion energy distribution functions in EUV induced plasma. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.
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title = "First-ever measurements of ion energy distribution functions in EUV induced plasma",
keywords = "EUV induced plasma, Mass spectrometry, ion energy distribution function",
author = "{van de Ven}, T.H.M. and P. Reefman and E.A. Osorio and V.Y. Banine and J. Beckers",
year = "2016",
month = "3",
day = "16",
language = "English",
note = "28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands ; Conference date: 15-03-2016 Through 16-03-2016",
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}

van de Ven, THM, Reefman, P, Osorio, EA, Banine, VY & Beckers, J 2016, 'First-ever measurements of ion energy distribution functions in EUV induced plasma' 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands, 15/03/16 - 16/03/16, .

First-ever measurements of ion energy distribution functions in EUV induced plasma. / van de Ven, T.H.M.; Reefman, P.; Osorio, E.A.; Banine, V.Y.; Beckers, J.

2016. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - First-ever measurements of ion energy distribution functions in EUV induced plasma

AU - van de Ven, T.H.M.

AU - Reefman, P.

AU - Osorio, E.A.

AU - Banine, V.Y.

AU - Beckers, J.

PY - 2016/3/16

Y1 - 2016/3/16

KW - EUV induced plasma

KW - Mass spectrometry

KW - ion energy distribution function

M3 - Poster

ER -

van de Ven THM, Reefman P, Osorio EA, Banine VY, Beckers J. First-ever measurements of ion energy distribution functions in EUV induced plasma. 2016. Poster session presented at 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16, 2016, Lunteren, The Netherlands, Lunteren, Netherlands.