Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads

D.W.M. Veldman, R.H.B. Fey, H.J Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferenceAbstractAcademic

72 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 28 Mar 2017
Event36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium - Sol-Cress, Spa, Belgium
Duration: 28 Mar 201730 Mar 2017
http://www.beneluxmeeting.nl/2017/

Conference

Conference36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium
CountryBelgium
CitySpa
Period28/03/1730/03/17
Internet address

Cite this