Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads

D.W.M. Veldman, R.H.B. Fey, H.J Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conference › Abstract › Academic

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Original language	English
Publication status	Published - 28 Mar 2017
Event	36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium - Sol-Cress, Spa, Belgium Duration: 28 Mar 2017 → 30 Mar 2017 http://www.beneluxmeeting.nl/2017/

Conference	36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium
Country/Territory	Belgium
City	Spa
Period	28/03/17 → 30/03/17
Internet address	http://www.beneluxmeeting.nl/2017/

Access to Document

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title = "Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads",

author = "D.W.M. Veldman and R.H.B. Fey and H.J Zwart and {van de Wal}, M.M.J. and {van den Boom}, J.D.B.J. and H. Nijmeijer",

year = "2017",

month = mar,

day = "28",

language = "English",

note = "36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium ; Conference date: 28-03-2017 Through 30-03-2017",

url = "http://www.beneluxmeeting.nl/2017/",

}

TY - CONF

T1 - Finite element and semi-analytic modeling of the temperature field of a wafer with moving heat loads

AU - Veldman, D.W.M.

AU - Fey, R.H.B.

AU - Zwart, H.J

AU - van de Wal, M.M.J.

AU - van den Boom, J.D.B.J.

AU - Nijmeijer, H.

PY - 2017/3/28

Y1 - 2017/3/28

M3 - Abstract

T2 - 36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium

Y2 - 28 March 2017 through 30 March 2017

ER -