Film microstructure control and characterization of plasma-deposited SiO2-like films

M.C.M. Sanden, van de; N.M. Terlinden; G. Aresta; M. Creatore

Film microstructure control and characterization of plasma-deposited SiO2-like films

M.C.M. Sanden, van de
, N.M. Terlinden
, G. Aresta
, M. Creatore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008
Editors	R. De Gryse, D. Depla, D. Poelman, S. Mathieu, W.P. Leroy, H. Poelman
Pages	141-141
Publication status	Published - 2008
Event	conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20 - Duration: 17 Nov 2008 → 20 Nov 2008

Conference

Conference	conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20
Period	17/11/08 → 20/11/08
Other	International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD)

Cite this

@inproceedings{8ba453d97bb642a4852b9cd91ae9e5b5,

title = "Film microstructure control and characterization of plasma-deposited SiO2-like films",

author = "\{Sanden, van de\}, M.C.M. and N.M. Terlinden and G. Aresta and M. Creatore",

year = "2008",

language = "English",

isbn = "978-90-334-7347-0",

pages = "141--141",

editor = "\{De Gryse\}, R. and D. Depla and D. Poelman and S. Mathieu and W.P. Leroy and H. Poelman",

booktitle = "Proceedings of ICTF14 \& RSD2008 : Ghent, Belgium, 17-20 November 2008",

note = "conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20 ; Conference date: 17-11-2008 Through 20-11-2008",

}

Sanden, van de, MCM, Terlinden, NM, Aresta, G & Creatore, M 2008, Film microstructure control and characterization of plasma-deposited SiO2-like films. in R De Gryse, D Depla, D Poelman, S Mathieu, WP Leroy & H Poelman (eds), Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. pp. 141-141, conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20, 17/11/08.

Film microstructure control and characterization of plasma-deposited SiO2-like films. / Sanden, van de, M.C.M.; Terlinden, N.M.; Aresta, G. et al.
Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. ed. / R. De Gryse; D. Depla; D. Poelman; S. Mathieu; W.P. Leroy; H. Poelman. 2008. p. 141-141.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Film microstructure control and characterization of plasma-deposited SiO2-like films

AU - Sanden, van de, M.C.M.

AU - Terlinden, N.M.

AU - Aresta, G.

AU - Creatore, M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SN - 978-90-334-7347-0

SP - 141

EP - 141

BT - Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008

A2 - De Gryse, R.

A2 - Depla, D.

A2 - Poelman, D.

A2 - Mathieu, S.

A2 - Leroy, W.P.

A2 - Poelman, H.

T2 - conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20

Y2 - 17 November 2008 through 20 November 2008

ER -

Film microstructure control and characterization of plasma-deposited SiO2-like films

Conference

Fingerprint

Cite this