@inproceedings{8fd03db9e4e540d3a26108a36e185a73,
title = "Film microstructure control and characterization of plasma-deposited Si02-like films by means of ellipsometric porosimetry",
author = "G. Aresta and N.M. Terlinden and M. Creatore and {Sanden, van de}, M.C.M.",
year = "2008",
language = "English",
pages = "479--479",
booktitle = "Proceedings of the 11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008), September 15-19, 2008, Garmisch-Partenkirchen, Germany (Abstracts)",
publisher = "s.n.",
note = "11th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2008) ; Conference date: 15-09-2008 Through 19-09-2008",
}