Film microstructure control and characterization of plasma-deposited SiO2-like films

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2008
Eventconference; ICTF-14; 2008-11-20; 2008-11-20 -
Duration: 20 Nov 200820 Nov 2008

Conference

Conferenceconference; ICTF-14; 2008-11-20; 2008-11-20
Period20/11/0820/11/08
OtherICTF-14

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