Femtosecond-laser processing of glass to create integrated microsystems

Y.J. Bellouard

doi:10.1117/2.1200901.1485

Femtosecond-laser processing of glass to create integrated microsystems

Y.J. Bellouard

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

A special interaction between lasers and glass enables small, single-material systems that combine optical, mechanical, and fluid-handling functions.

Original language	English
Number of pages	2
Journal	SPIE Newsroom
DOIs	https://doi.org/10.1117/2.1200901.1485
Publication status	Published - 2009

Access to Document

10.1117/2.1200901.1485

Cite this

@article{f85e3e2cb7a84f2f8af6b3f93c1df652,

title = "Femtosecond-laser processing of glass to create integrated microsystems",

abstract = "A special interaction between lasers and glass enables small, single-material systems that combine optical, mechanical, and fluid-handling functions.",

author = "Y.J. Bellouard",

year = "2009",

doi = "10.1117/2.1200901.1485",

language = "English",

journal = "SPIE Newsroom",

issn = "1818-2259",

}

TY - JOUR

T1 - Femtosecond-laser processing of glass to create integrated microsystems

AU - Bellouard, Y.J.

PY - 2009

Y1 - 2009

N2 - A special interaction between lasers and glass enables small, single-material systems that combine optical, mechanical, and fluid-handling functions.

AB - A special interaction between lasers and glass enables small, single-material systems that combine optical, mechanical, and fluid-handling functions.

U2 - 10.1117/2.1200901.1485

DO - 10.1117/2.1200901.1485

M3 - Article

SN - 1818-2259

JO - SPIE Newsroom

JF - SPIE Newsroom

ER -

Femtosecond-laser processing of glass to create integrated microsystems

Abstract

Access to Document

Fingerprint

Cite this