Femtosecond laser processing of active and passive devices for bio-MEMS

Y. Bellouard

doi:10.1109/CLEOPR.2013.6600168

Femtosecond laser processing of active and passive devices for bio-MEMS

Y. Bellouard

Microsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

Original language	English
Title of host publication	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	2
ISBN (Print)	9781467364751
DOIs	https://doi.org/10.1109/CLEOPR.2013.6600168
Publication status	Published - 2013
Event	Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan Duration: 30 Jun 2013 → 4 Jul 2013 Conference number: 10

Conference

Conference	Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Abbreviated title	CLEO-PR 2013
Country/Territory	Japan
City	Kyoto
Period	30/06/13 → 4/07/13

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10.1109/CLEOPR.2013.6600168

Cite this

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title = "Femtosecond laser processing of active and passive devices for bio-MEMS",

abstract = "Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.",

author = "Y. Bellouard",

year = "2013",

doi = "10.1109/CLEOPR.2013.6600168",

language = "English",

isbn = "9781467364751",

booktitle = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, CLEO-PR 2013 ; Conference date: 30-06-2013 Through 04-07-2013",

}

Bellouard, Y 2013, Femtosecond laser processing of active and passive devices for bio-MEMS. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest., 6600168, Institute of Electrical and Electronics Engineers, Piscataway, Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 30/06/13. https://doi.org/10.1109/CLEOPR.2013.6600168

TY - GEN

T1 - Femtosecond laser processing of active and passive devices for bio-MEMS

AU - Bellouard, Y.

N1 - Conference code: 10

PY - 2013

Y1 - 2013

N2 - Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

AB - Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

UR - https://www.scopus.com/pages/publications/84885459629

U2 - 10.1109/CLEOPR.2013.6600168

DO - 10.1109/CLEOPR.2013.6600168

M3 - Conference contribution

AN - SCOPUS:84885459629

SN - 9781467364751

BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013

Y2 - 30 June 2013 through 4 July 2013

ER -

Femtosecond laser processing of active and passive devices for bio-MEMS

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