Fast plasma deposition with the thermal plasma expansion technique

M.C.M. Sanden, van de, D.C. Schram, J.W.A.M. Gielen, A.J.M. Buuron, G.J. Meeusen, R.J. Severens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia
Publication statusPublished - 1994
Event8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia - Australian National Library, Canberra, Australia
Duration: 7 Feb 199410 Feb 1994

Conference

Conference8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia
CountryAustralia
CityCanberra
Period7/02/9410/02/94
OtherGEM 1994

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