Fast plasma deposition with the thermal plasma expansion technique

M.C.M. Sanden, van de; D.C. Schram; J.W.A.M. Gielen; A.J.M. Buuron; G.J. Meeusen; R.J. Severens

Fast plasma deposition with the thermal plasma expansion technique

M.C.M. Sanden, van de, D.C. Schram, J.W.A.M. Gielen, A.J.M. Buuron, G.J. Meeusen, R.J. Severens

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia
Publication status	Published - 1994
Event	8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia - Australian National Library, Canberra, Australia Duration: 7 Feb 1994 → 10 Feb 1994

Conference

Conference	8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia
Country/Territory	Australia
City	Canberra
Period	7/02/94 → 10/02/94
Other	GEM 1994

Cite this

@inproceedings{2b9edb5bdca34f8a9fee1007784701cb,

title = "Fast plasma deposition with the thermal plasma expansion technique",

author = "{Sanden, van de}, M.C.M. and D.C. Schram and J.W.A.M. Gielen and A.J.M. Buuron and G.J. Meeusen and R.J. Severens",

year = "1994",

language = "English",

booktitle = "Proceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia",

note = "8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia ; Conference date: 07-02-1994 Through 10-02-1994",

}

Sanden, van de, MCM , Schram, DC, Gielen, JWAM, Buuron, AJM, Meeusen, GJ & Severens, RJ 1994, Fast plasma deposition with the thermal plasma expansion technique. in Proceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia. 8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia, Canberra, Australian Capital Territory, Australia, 7/02/94.

TY - GEN

T1 - Fast plasma deposition with the thermal plasma expansion technique

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

AU - Gielen, J.W.A.M.

AU - Buuron, A.J.M.

AU - Meeusen, G.J.

AU - Severens, R.J.

PY - 1994

Y1 - 1994

M3 - Conference contribution

BT - Proceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia

T2 - 8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia

Y2 - 7 February 1994 through 10 February 1994

ER -