Fast expanding plasma beam deposition of C and Si-thin layers

D.C. Schram, J.W.A.M. Gielen, A.J.M. Buuron, G.J. Meeusen, S.N. Doumtchenko, P.D. Haaland, M.C.M. van de Sanden

Research output: Contribution to conferenceAbstractAcademic

5 Downloads (Pure)
Original languageEnglish
Number of pages1
Publication statusPublished - 1993
Event46th Annual Gaseous Electronics Conference - Montreal, Canada
Duration: 19 Oct 199322 Oct 1993

Conference

Conference46th Annual Gaseous Electronics Conference
CountryCanada
CityMontreal
Period19/10/9322/10/93

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