@inproceedings{d8447b0c3a944b5bb84b355b8f0663e9,
title = "Fast deposition of thin layers of amorphous hydrogenated carbon and silicon layers",
author = "J.W.A.M. Gielen and R.J. Severens and W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",
year = "1997",
language = "English",
pages = "51--52",
editor = "K. Tachibana and Y. Watanabe",
booktitle = "Proceedigns of the ICRP-3/SPP-14 : 3rd International Conference on Reactive Plasmas and 14th Symposium on Plasma Processing, January 21-24, 1997, Nara, Japan, vol. 4",
publisher = "s.n.",
note = "conference; ICRP-3/SPP-14 : 3rd International Conference on Reactive Plasmas and 14th Symposium on Plasma Processing, January 21-24, 1997, Nara, Japan; 1997-01-21; 1997-01-24 ; Conference date: 21-01-1997 Through 24-01-1997",
}