Fast deposition of plasma polymer layers

J.J. Beulens, G.M.W. Kroesen, D.C. Schram, C.J. Timmermans, P.C.N. Crouzen, H. Vasmel, H.J.A. Schuurmans, C.B. Beijer, J. Werner

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Abstract

In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the arc. The polymer deposition rate increases with arc power, Ar flow rate, and PhMe flow rate. [on SciFinder (R)]
Original languageEnglish
Pages (from-to)527-540
JournalJournal of Applied Polymer Science: Applied Polymer Symposium
Volume46
Publication statusPublished - 1990

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