Fast deposition of plasma polymer layers

J.J. Beulens; G.M.W. Kroesen; D.C. Schram; C.J. Timmermans; P.C.N. Crouzen; H. Vasmel; H.J.A. Schuurmans; C.B. Beijer; J. Werner

Fast deposition of plasma polymer layers

J.J. Beulens, G.M.W. Kroesen, D.C. Schram, C.J. Timmermans, P.C.N. Crouzen, H. Vasmel, H.J.A. Schuurmans, C.B. Beijer, J. Werner

Plasma & Materials Processing

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Abstract

In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the arc. The polymer deposition rate increases with arc power, Ar flow rate, and PhMe flow rate. [on SciFinder (R)]

Original language	English
Pages (from-to)	527-540
Journal	Journal of Applied Polymer Science: Applied Polymer Symposium
Volume	46
Publication status	Published - 1990

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title = "Fast deposition of plasma polymer layers",

abstract = "In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the arc. The polymer deposition rate increases with arc power, Ar flow rate, and PhMe flow rate. [on SciFinder (R)]",

author = "J.J. Beulens and G.M.W. Kroesen and D.C. Schram and C.J. Timmermans and P.C.N. Crouzen and H. Vasmel and H.J.A. Schuurmans and C.B. Beijer and J. Werner",

year = "1990",

language = "English",

volume = "46",

pages = "527--540",

journal = "Journal of Applied Polymer Science: Applied Polymer Symposium",

issn = "0271-9460",

}

TY - JOUR

T1 - Fast deposition of plasma polymer layers

AU - Beulens, J.J.

AU - Kroesen, G.M.W.

AU - Schram, D.C.

AU - Timmermans, C.J.

AU - Crouzen, P.C.N.

AU - Vasmel, H.

AU - Schuurmans, H.J.A.

AU - Beijer, C.B.

AU - Werner, J.

PY - 1990

Y1 - 1990

N2 - In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the arc. The polymer deposition rate increases with arc power, Ar flow rate, and PhMe flow rate. [on SciFinder (R)]

AB - In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the arc. The polymer deposition rate increases with arc power, Ar flow rate, and PhMe flow rate. [on SciFinder (R)]

M3 - Article

SN - 0271-9460

VL - 46

SP - 527

EP - 540

JO - Journal of Applied Polymer Science: Applied Polymer Symposium

JF - Journal of Applied Polymer Science: Applied Polymer Symposium

ER -

Fast deposition of plasma polymer layers

Abstract

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