Fast deposition of amorphous hydrogenated silicon layers

G.J. Meeusen, R.M.A. Driessens, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationProceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France
Subtitle of host publicationpapers
Place of PublicationParis
PublisherSociété Française du Vide
Pages99-101
Publication statusPublished - 1993

Publication series

NameLe vide, les couches minces
NumberSuppl. 266
Volume49

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