Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma

A.J.M. Buuron, M.C.M. Sanden, van de, W.J. Ooij, van, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	Proceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France
Subtitle of host publication	papers
Place of Publication	Paris
Publisher	Société Française du Vide
Pages	89-91
Publication status	Published - 1993

Cite this

Buuron, A. J. M., Sanden, van de, M. C. M., Ooij, van, W. J., & Schram, D. C. (1993). Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma. In Proceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France: papers (pp. 89-91). (Le vide, les couches minces; Vol. 49, No. Suppl. 266). Société Française du Vide.

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title = "Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma",

author = "A.J.M. Buuron and {Sanden, van de}, M.C.M. and {Ooij, van}, W.J. and D.C. Schram",

year = "1993",

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publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

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Buuron, AJM, Sanden, van de, MCM, Ooij, van, WJ & Schram, DC 1993, Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma. in Proceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France: papers. Le vide, les couches minces, no. Suppl. 266, vol. 49, Société Française du Vide, Paris, pp. 89-91.

Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma. / Buuron, A.J.M.; Sanden, van de, M.C.M.; Ooij, van, W.J. et al.
Proceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France: papers. Paris: Société Française du Vide, 1993. p. 89-91 (Le vide, les couches minces; Vol. 49, No. Suppl. 266).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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T1 - Fast deposition of amorphous hydrogenated carbon by an expanding cascaded arc plasma

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BT - Proceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France

PB - Société Française du Vide

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