Fast deposition of amorphous carbon films by an expanding cascaded arc plasma jet

A.J.M. Buuron, M.C.M. Sanden, van de, W.J. Ooij, van, R.M.A. Driessens, D.C. Schram

Research output: Contribution to journalArticleAcademicpeer-review

36 Citations (Scopus)
185 Downloads (Pure)
Original languageEnglish
Pages (from-to)528-540
JournalJournal of Applied Physics
Volume78
Issue number1
DOIs
Publication statusPublished - 1995

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