@conference{ce463f87373a412fb29f6a4a60f58c14,
title = "Fast deposition of amorphous and crystalline carbon and spectroscopic analysis of the plasma",
author = "A.J.M. Buuron and J.J. Beulens and N.T. Guerassimov and C. Chauveau and \{Sanden, van de\}, M.C.M. and D.C. Schram",
note = "Proceedings of the Gordon Conference on Plasma Chemistry, New London, USA, 10-14 August 1992; Gordon Conference on Plasma Chemistry, August 10-14, 1992, New London, NH, USA ; Conference date: 10-08-1992 Through 14-08-1992",
year = "1992",
language = "English",
}